面外轴向检测MEMS加速度计研究现状

面外轴向检测微机电系统（MEMS）加速度计（Z轴MEMS加速度计）是MEMS惯性系统中用于提供面外加速度信号的重要器件。文章首先介绍了Z轴加速度计的两种典型结构，列举了国内外科研机构近年来的研究成果，概述其在结构设计、工艺制造等方面的特点，以及在性能指标、三轴单片集成等方面的进展。最后，结合Z轴MEMS加速度计的研究现状，对其在结构优化、性能提升、工艺制造、单片三轴集成等方向的发展进行了展望。     

基于LabVIEW的加速度计离心试验动态半径测量方法

提出了一种基于激光三角测距法测量加速度计离心试验中的动态半径的方法。详细介绍了传感器选取依据、测量系统的机械机构和测量软件的编程工具。利用激光三角动态半径测量仪器对LXJ-40型精密离心机试验时的动态半径进行了测量,根据测量结果,在检定加速度计时把动态半径产生的误差进行修正,提高了检定精度。     

Unbiased acceleration measurements with an electrostatic accelerometer on a rotating platform

The Gravity Advanced Package is an instrument composed of an electrostatic accelerometer called MicroSTAR and a rotating platform called Bias Rejection System. It aims at measuring with no bias the non-gravitational acceleration of a spacecraft. It is envisioned to be embarked on an interplanetary spacecraft as a tool to test the laws of gravitation.     

Free fall tests of the accelerometers of the MICROSCOPE mission

The MICROSCOPE mission is fully dedicated to the in-orbit test of the Universality of free fall, the so-called Weak Equivalence Principle (WEP), with an expected accuracy better than 10⁻¹⁵. The test principle consists in comparing the accelerations of two proof masses of different composition in the Earth gravitational field. The payload embarks two pairs of test-masses made of Platinum Rhodium and Titanium alloys at the core of two dedicated coaxial electrostatic accelerometers. These instruments are under qualification for a launch in 2016.     

Impact of a novel hybrid accelerometer on satellite gravimetry performance

The state-of-the-art electrostatic accelerometers (EA) used for the retrieval of non-gravitational forces acting on a satellite constitute a core component of every dedicated gravity field mission. However, due to their difficult-to-control thermal drift in the low observation frequencies, they are also one of the most limiting factors of the achievable performance of gravity recovery. Recently, a hybrid accelerometer consisting of a regular EA and a novel cold atom interferometer (CAI) that features a time-invariant observation stability and constantly recalibrates the EA has been developed in order to remedy this major drawback. In this paper we aim to assess the value of the hybrid accelerometer for gravity field retrieval in the context of GRACE-type and Bender-type missions by means of numerical closed-loop simulations where possible noise specifications of the novel instrument are considered and different components of the Earth’s gravity field signal are added subsequently. It is shown that the quality of the gravity field solutions is mainly dependent on the CAI’s measurement accuracy. While a low CAI performance (10^?8 to 10^?9?m/s²/Hz^1/2) does not lead to any gains compared to a stand-alone EA, a sufficiently high one (10^?11?m/s²/Hz^1/2) may improve the retrieval performance by over one order of magnitude. We also show that improvements which are limited to low-frequency observations may even propagate into high spherical harmonic degrees. Further, the accelerometer performance seems to play a less prominent role if the overall observation geometry is improved as it is the case for a Bender-type mission. The impact of the accelerometer measurements diminishes further when temporal variations of the gravity field are introduced, pointing out the need for proper de-aliasing techniques. An additional study reveals that the hybrid accelerometer is – contrary to a stand-alone EA – widely unaffected by scale factor instabilities.     

静电悬浮微加速度计高灵敏度电容检测通道设计

高灵敏度电容式位移检测是实现静电悬浮微加速度计闭环测控的关键技术之一.针对微加速度计径向悬浮检测的特点及指标要求,设计了高灵敏度、高精度电容式微位移检测通道.该通道主要由前置RC隔离网络与C/V转换、高共模抑制比差动放大器、二级运放、二阶压控电压源有源带通滤波、相敏解调(含模拟乘法器与四阶Butterworth低通滤波...     

随机振动校准加速度计方法研究

介绍了随机振动校准加速度计系统的实现.使用随机信号传感器绝对校准方法,得到了较为理想的加速度计频响曲线.与传统的方法相比在保证校准精度的前提下,提高了效率.     

印刷电路板振动模态的精确测试方法

印刷电路板的动力学特性直接影响机载电子设备在振动和冲击环境下的工作可靠性,有必要在设计阶段对其进行动力学分析.印刷电路板为薄壁结构,质量一般较小,在使用传统的加速度传感器测量时,传感器的附加质量会对模态测试结果造成影响.通过加速度传感器与激光测振仪测试数据的对比,分析了加速度传感器附加质量对模态测试结果的影响,验证了传感器附加质量消除方法的效果,结论认为传感器附加质量对印刷电路板模态测试的结果影响明显且这种影响不能被完全消除;使用扫描式激光测振仪可以得到精确详细的模态参数.     

基于FPGA的捷联惯组数据采集系统设计与实现

惯性器件性能的好坏直接决定了武器系统的性能,惯性器件的测试工作需要专门的脉冲采集系统来实现,本文介绍了一种基于FPGA的新型惯组脉冲采集系统,通过选用XC3S1000-4FGG676I芯片轻松实现了多路脉冲信号、交直流电压量以及温度传感器信号采集,抗干扰措施的采用有效地保证了该系统的稳定性和可靠性,经过大量的试验考核目前已经正式运用于捷联惯组的单元测试过程中。     

高精度加速度计力矩器磁路的设计与仿真分析

力矩器磁路性能决定了加速度计标度因数的性能,为此利用有限元方法对力矩器磁路的磁通密度进行分析,在此基础上提出了两种结构优化设计方案,并对其进行仿真计算。仿真结果表明,改变导磁帽的形状可以提高气隙磁场的磁通密度的稳定性和均匀性,但导磁帽易出现饱和现象;通过降低磁钢的高度,同时增加导磁帽的高度,既能大幅度的提高磁场的稳定性和均匀性,导磁帽也不会出现饱和现象,但气隙磁场的磁通密度均值会降低37.25%,非线性误差为1.83%,优化后气隙磁场存在着磁通密度稳定（径向均值为0.42868T）和均匀的区域。